MEMS & Microsystems

MEMS & Microsystems
Lecture Series on MEMS & Microsystems by Prof. Santiram Kal, Department of Electronics & Electrical Communication Engineering, IIT Kharagpur.
Lecture - 1 Introduction to MEMS & Microsystems
Lecture - 2 Introduction to Microsensors
Lecture - 3 Evoluation of MEMS, Microsensors, Market Survey
Lecture - 4 Application of MEMS
Lecture - 5 MEMS Materials
Lecture - 6 MEMS Materials' Properties
Lecture - 7 MEMS Materials Properties (Contd.)
Lecture - 8 Microelectronic Technology for MEMS - II
Lecture - 9 Microelectronic Technology for MEMS - III
Lecture - 10 Micromachining Technology for MEMS
Lecture - 11 Micromachining Process
Lecture - 12 Etch Stop Techniques and Microstructure
Lecture - 13 Surface and Quartz Micromachining
Lecture - 14 Fabrication of Micromachined Microstructure
Lecture - 15 Microstereolithography
Lecture - 16 MEMS Microsensors Thermal
Lecture - 17 Micromachined Microsensors Mechanical
Lecture - 18 MEMS Pressure and Flow Sensor
Lecture - 19 Micromachined Flow Sensors
Lecture - 20 MEMS Inertial Sensors
Lecture - 21 Micromachined Microaccelerometers for MEMS
Lecture - 22 MEMS Accelerometers for Avionics
Lecture - 23 Temperature Drift and Damping Analysis
Lecture - 24 Piezoresistive Accelerometer Technology
Lecture - 25 MEMS Capacitive Accelerometer
Lecture - 26 MEMS Capacitive Accelerometer Process
Lecture - 27 MEMS Gyro Sensor
Lecture - 28 MEMS for Space Application
Lecture - 29 Polymer MEMS & Carbon Nano Tubes CNT
Lecture - 30 Wafer Bonding & Packaging of MEMS
Lecture - 31 Interface Electronics for MEMS